| Similarity | Rank | |
|---|---|---|
| high_accuracy | 0.781 | 91685 |
| precision | 0.708 | 6654 |
| calibration_of | 0.617 | 47010 |
| datum_acquisition | 0.612 | 73975 |
| calibration | 0.612 | 14015 |
| high-resolution | 0.598 | 42672 |
| workpiece | 0.596 | 89261 |
| machine_tool | 0.588 | 65633 |
| high_sensitivity | 0.586 | 82486 |
| high_resolution | 0.585 | 18800 |
| high_throughput | 0.577 | 81477 |
| accuracy | 0.571 | 4727 |
| repeatability | 0.564 | 95858 |
| metrology | 0.563 | 66559 |
| Precision | 0.556 | 70126 |
| spectrometer | 0.554 | 46182 |
| accuracy_of | 0.551 | 26571 |
| calibrate | 0.548 | 14268 |
| sensor_system | 0.546 | 91943 |
| optical | 0.545 | 13770 |
| spatial_resolution | 0.543 | 77859 |
| high_efficiency | 0.541 | 32026 |
| optical_system | 0.540 | 82100 |
| a_high_resolution | 0.538 | 99438 |
| high_reliability | 0.538 | 88443 |